CRS ZPure™ M gas filters

CRS gas purifiers and filters

Pure gas is a critical requirement in gas chromatography, spectroscopy, optics, lithography, and numerous other applications in manufacturing and analytical laboratories. The ZPure™ M filters remove a wide range of contaminants to trace levels. The ZPure M filters are 3800 cc canisters that have the benefits of higher flow rates, larger capacities, and are refillable in most versions.

Features and benefits

  • High-efficiency in-line traps with outstanding capacity.
  • High quality activated adsorbents for long purifier life and efficient contaminant removal.
  • Filter lifetime is dependent on quality of incoming gas, and the flow rate.
  • Made from 316 stainless steel.
  • 1/4" stainless steel compression or 1/2" VCR fittings.
  • Individually leak-tested.

Recommended applications

It can be used to purify inert gases, He, Ar, N2, and H2, in larger capacities. It is recommended for any application requiring ultra-pure gas free from contaminants, and has worked well in semi-conductor applications.

Product specifications

ZPure M Volume Function Capacity (nominal-max) Outlet concentration at nominal flow rate Flow rate (nominal-max) Max pressure Dimensions
HC 3800 cc Removes hydrocarbons 327 - 1,060 g* < 5 ppb 30 - 200 SLPM 150 psi for air, N2 or inert gases
80 psi for H2 or O2
10 cm x 64 cm
H2O Removes water 369 - 640 g** < 20 ppb 30 - 200 SLPM
CO2 Removes carbon dioxide 300 - 564 cc*** < 5 ppb < 20 SLPM
PolyGas II Removes water and hydrocarbons 180 - 281 g** H2O
159 - 530 g* HC
< 20 ppb H2O
< 5 ppb HC
30 - 100 SLPM
O2/H2O Removes oxygen and water 8,100 - 13,658 cc O2
129 - 196 g* H2O
< 5 ppb O2
< 20 ppb H2O
14 - 40 SLPM

* Hydrocarbons (C5 and heavier); capacity based on 0.05% pentane inlet concentration.
** Water capacity based on an inlet moisture concentration of 200 ppm.
*** Capacity based on an inlet CO2 concentration of 400 ppm.

More

Please refer to the part number list for more items.

For technical information such as manuals and MSDS please visit chromres.com/resources.

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