Pure gas is a critical requirement in gas chromatography, spectroscopy, optics, lithography, and numerous other applications in manufacturing and analytical laboratories. The ZPure™ M filters remove a wide range of contaminants to trace levels. The ZPure M filters are 3800 cc canisters that have the benefits of higher flow rates, larger capacities, and are refillable in most versions.
It can be used to purify inert gases, He, Ar, N2, and H2, in larger capacities. It is recommended for any application requiring ultra-pure gas free from contaminants, and has worked well in semi-conductor applications.
|ZPure M||Volume||Function||Capacity (nominal-max)||Outlet concentration at nominal flow rate||Flow rate (nominal-max)||Max pressure||Dimensions|
|HC||3800 cc||Removes hydrocarbons||327 - 1,060 g*||< 5 ppb||30 - 200 SLPM||150 psi for air, N2 or inert gases
80 psi for H2 or O2
|10 cm x 64 cm|
|H2O||Removes water||369 - 640 g**||< 20 ppb||30 - 200 SLPM|
|CO2||Removes carbon dioxide||300 - 564 cc***||< 5 ppb||< 20 SLPM|
|PolyGas II||Removes water and hydrocarbons||180 - 281 g** H2O
159 - 530 g* HC
|< 20 ppb H2O
< 5 ppb HC
|30 - 100 SLPM|
|O2/H2O||Removes oxygen and water||8,100 - 13,658 cc O2
129 - 196 g* H2O
|< 5 ppb O2
< 20 ppb H2O
|14 - 40 SLPM|
* Hydrocarbons (C5 and heavier); capacity based on 0.05% pentane inlet concentration.
** Water capacity based on an inlet moisture concentration of 200 ppm.
*** Capacity based on an inlet CO2 concentration of 400 ppm.
Please refer to the part number list for more items.
For technical information such as manuals and MSDS please visit chromres.com/resources.
Find in table:
|Part number||Part description and detail|
|Vacuum Coupling Radiation (VCR) fittings|
|202230M-V||ZPure M H2O filter, 1/2" vacuum coupling radiation fittings|
|202287M-V||ZPure M PolyGas II filter, 1/2" vacuum coupling radiation fittings|
|202295M-V||ZPure M O2 / H2O filter, 1/2" vacuum coupling radiation fittings|
|202232M-V||ZPure M Hydrocarbon filter, 1/2" vacuum coupling radiation fittings|
|Stainless steel compression fittings|
|202233M-SS||ZPure M Hydrocarbon filter, 1/4" stainless steel fittings|
|202231M-SS||ZPure M H2O filter, 1/4" stainless steel fittings|
|202296M-SS||ZPure M O2 / H2O filter, 1/4" stainless steel fittings|
|202288M-SS||ZPure M PolyGas II filter, 1/4" stainless steel fittings|