CRS ZPure™ Ultra gas filters

Find out more about Chromatography Research Supplies (CRS), now part of the Trajan family of brands.

Pure gas is a critical requirement in gas chromatography, spectroscopy, optics, lithography, and numerous other applications in manufacturing and analytical laboratories. The ZPure™ Ultra filters are designed for use when extremely pure gas is critical to the application such as in the microelectronics and semiconductors industry.

Features and benefits

High-quality 316 stainless steel construction.
Electro polished surface finish.
Outlet purity to low ppb levels.
For use at ambient temperatures.
0.003 μm outlet particle filter.
1/4" metal gasket seal fittings.
Available in hydrocarbon, and 3A or 5A moisture removing.

Recommended applications

For use when extremely pure gas is critical to the application. Ideal for small scale microelectronics and semiconductor use.

Product specifications

ZPure Ultra	Function	Max flow rate	Max pressure	Dimensions	Fittings
3A H₂O	Removes water from inert gases	20 SLPM	68.9 bar / 1000 psi	3.5" x 1.25"	1/4" metal gasket seals
5A H₂O	Removes water from inert gases
HC	Removes hydrocarbons from inert gases

Please refer to the part number list for more items.

For technical information such as manuals and MSDS please visit chromres.com/resources.

More information

Part Number List - CRS ZPure™ Ultra gas filter

Download: Part Number List - CRS ZPure™ Ultra gas filter [PDF]

Also see: Product Data Sheet - CRS ZPure™ Ultra gas filter

Find in table:

Part number	Part description and detail
202371-V	ZPure Ultra 3A moisture filter, 1/4" metal gasket seal fittings
202373-V	ZPure Ultra 5A moisture filter, 1/4" metal gasket seal fittings
202375-V	ZPure Ultra Hydrocarbon filter, 1/4" metal gasket seal fittings