Pure gas is a critical requirement in gas chromatography, spectroscopy, optics, lithography, and numerous other applications in manufacturing and analytical laboratories. The ZPure™ Ultra filters are designed for use when extremely pure gas is critical to the application such as in the microelectronics and semiconductors industry.
For use when extremely pure gas is critical to the application. Ideal for small scale microelectronics and semiconductor use.
|ZPure Ultra||Function||Max flow rate||Max pressure||Dimensions||Fittings|
|3A H2O||Removes water from inert gases||20 SLPM||68.9 bar / 1000 psi||3.5" x 1.25"||1/4" metal gasket seals|
|HC||Removes hydrocarbons from inert gases|
Please refer to the part number list for more items.
For technical information such as manuals and MSDS please visit chromres.com/resources.
Find in table:
|Part number||Part description and detail|
|202371-V||ZPure Ultra 3A moisture filter, 1/4" metal gasket seal fittings|
|202373-V||ZPure Ultra 5A moisture filter, 1/4" metal gasket seal fittings|
|202375-V||ZPure Ultra Hydrocarbon filter, 1/4" metal gasket seal fittings|