Pure gas is a critical requirement in gas chromatography, spectroscopy, optics, lithography, and numerous other applications in manufacturing and analytical laboratories. The ZPure™ Ultra filters are designed for use when extremely pure gas is critical to the application such as in the microelectronics and semiconductors industry.
Features and benefits
- High-quality 316 stainless steel construction.
- Electro polished surface finish.
- Outlet purity to low ppb levels.
- For use at ambient temperatures.
- 0.003 μm outlet particle filter.
- 1/4" metal gasket seal fittings.
- Available in hydrocarbon, and 3A or 5A moisture removing.
Recommended applications
For use when extremely pure gas is critical to the application. Ideal for small scale microelectronics and semiconductor use.
Product specifications
| ZPure Ultra | Function | Max flow rate | Max pressure | Dimensions | Fittings |
|---|---|---|---|---|---|
| 3A H2O | Removes water from inert gases | 20 SLPM | 68.9 bar / 1000 psi | 3.5" x 1.25" | 1/4" metal gasket seals |
| 5A H2O | |||||
| HC | Removes hydrocarbons from inert gases |
More information:
3 products
Part Number List - CRS ZPure™ Ultra gas filter
Collections: All, Analytical, CRS gas purifiers and filters, CRS ZPure™ Ultra gas filters, Introducing the CRS range of products to the Trajan portfolio, Literature - All, Literature - Analytical, Part Number Lists, Select by instrument - Analytical, Support items, Trajan gas filters
Product Data Sheet - CRS ZPure™ Ultra gas filter
Collections: All, Analytical, CRS gas purifiers and filters, CRS ZPure™ Ultra gas filters, Introducing the CRS range of products to the Trajan portfolio, Literature - All, Literature - Analytical, Product Data Sheets, Select by instrument - Analytical, Support items, Trajan gas filters
Brochure - CRS gas purifiers and filters
Collections: All, Analytical, Brochures, CRS Advanced Filter System (AFS) gas purifiers, CRS gas purifiers and filters, CRS Infinity H₂ gas purifiers, CRS SPure™ H₂O gas filters, CRS ZPure O₂/H₂O gas filters, CRS ZPure™ Glass H₂O HSMI gas purifiers, CRS ZPure™ Glass PolyGas gas purifiers, CRS ZPure™ HC (Hydrocarbon) gas filters, CRS ZPure™ H₂O gas filters, CRS ZPure™ M gas filters, CRS ZPure™ PolyGas gas purifiers, CRS ZPure™ Ultra gas filters, Introducing the CRS range of products to the Trajan portfolio, Literature - All, Literature - Analytical, Select by instrument - Analytical, Support items, Trajan gas filters