CRS ZPure™ Ultra gas filters

CRS gas purifiers and filters

Pure gas is a critical requirement in gas chromatography, spectroscopy, optics, lithography, and numerous other applications in manufacturing and analytical laboratories. The ZPure™ Ultra filters are designed for use when extremely pure gas is critical to the application such as in the microelectronics and semiconductors industry.

Features and benefits

  • High-quality 316 stainless steel construction.
  • Electro polished surface finish.
  • Outlet purity to low ppb levels.
  • For use at ambient temperatures.
  • 0.003 μm outlet particle filter.
  • 1/4" metal gasket seal fittings.
  • Available in hydrocarbon, and 3A or 5A moisture removing.

Recommended applications

For use when extremely pure gas is critical to the application. Ideal for small scale microelectronics and semiconductor use.

Product specifications

ZPure Ultra Function Max flow rate Max pressure Dimensions Fittings
3A H2O Removes water from inert gases 20 SLPM 68.9 bar / 1000 psi 3.5" x 1.25" 1/4" metal gasket seals
5A H2O
HC Removes hydrocarbons from inert gases


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